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An Introduction to

Microelectromechanical

Systems Engineering

Second Edition

For a listing of recent titles in the Artech House Microelectromechanical

Systems ( MEMS ) Series, turn to the back of this book.

An Introduction to

Microelectromechanical

Systems Engineering

Second Edition

Nadim Maluf

Kirt Williams

Artech House, Inc.

Boston • London

www.artechhouse.com

Library of Congress Cataloging-in-Publication Data

A catalog record for this book is available from the U.S. Library of Congress.

British Library Cataloguing in Publication Data

Maluf, Nadim.

An Introduction to microelectromechanical systems engineering–2nd ed. –(Artech House

microelectromechanical library)

1. Microelectromechanical systems

I. Title II. Williams, Kirt

621.3’81

ISBN 1-58053-590-9

Cover design by Igor Valdman

685 Canton Street

Norwood, MA 02062

may be reproduced or utilized in any form or by any means, electronic or mechanical, includ-

ing photocopying, recording, or by any information storage and retrieval system, without

permission in writing from the publisher.

All terms mentioned in this book that are known to be trademarks or service marks have

been appropriately capitalized. Artech House cannot attest to the accuracy of this informa-

tion. Use of a term in this book should not be regarded as affecting the validity of any trade-

mark or service mark.

International Standard Book Number: 1-58053-590-9

10987654321

Maluf N. Williams K. - Introduction to Microelectromechanical Systems Engineering.pdf